Microsphere Formation Using an Excimer Laser
نویسندگان
چکیده
Silicon microspheres 800 nm to 10 m have been formed using an excimer laser. The method described in this paper shows that microspheres can be formed with high yield and free of contamination. Silicon microspheres enable new applications where silica microspheres fall short. Due to their semiconducting properties, new photonic devices can be developed for nano-electro-optical applications. Keywords-microsphere; MDR; microcavity; resonator; excimer; silicon photonics; WGM
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